A Review on Research Development and Perspective on Piezoresistive Pressure Sensor
Keywords:
Piezoresistive Sensor, Pressure Sensor, MEMSAbstract
In this review paper, piezoresistive pressure sensors (PPS) research and development discussed from 2010 to 2025. The workhorse of pressure sensing across industries owing to their simple readout, CMOS-compatibility, and wide dynamic range. Over the past fifteen years, PPS research has accelerated along various vectors and miniature biomedical microfluidics. This review synthesizes developments from roughly 2010–2025.
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